Specifications
- Resolution: STEM HAADF image 70 pm (200 kV), 100 pm (80 kV), 160 pm (30 kV)
TEM information limit 100 pm (200 kV), 110 pm (80 kV), 250 pm (30 kV)
- Electron gun: Cold field emission gun (Cold FEG): standard
- Aberration corrector: STEM: NEO ASCOR HOAC※2, TEM: CETCOR with DSS※3
- Corrector auto tuning system: NEO JEOL COSMOTM Auto tuning system Ad-hock tune (SIAM) built-in
- Accelerating voltage:30 to 200 kV (30, 80, 200 kV: standard, 60, 120 kV: optional)
- Magnetic field free mode: Lorentz lens settings (×50 to 80 k on screen): standard
- Specimen movement system: X, Y and Z super-fine mechanical drive, ultra-fine piezo device drives: standard
- Operation type: RDS※4 operation
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