Make and Model

Hitachi, DSC7020

Specifications

• Measurement Method - Heat Flux
• Temperature Range - -150 to 600 ⁰C
• Heating rate/Cooling rate - 0.1 to 100 C/min
• Cooling Units - LN2 gas cooling and Electrical Cooling

Make and Model

EBG 500

Specifications

• Stainless steel vacuum chamber with convenient loading and unloading of substrates and a viewport
• Water cooled electron beam evaporation source with all connecting joints for tubings
• Electron beam sweep controller functionality in the ebeam gun
• Motorized turret for source with all necessary hardware
• 3 KW or higher electron beam power supply with all connecting cables
• All safety interlocks in electron beam gun assembly
• Thermal evaporation source with a minimum of 200 A /10 V power supply and associated cables
• Plasma based cleaning substrate holder
• Substrate rotation and heating up to 500 deg C or higher
• Digital thickness monitor with rate and thickness display. Thickness up to 999 Angstrom
• High vacuum system: Rotary backed oil diffusion pump with LN2 trap or a turbo-molecular pump for dry vacuum in the range of 10-6 torr
• Compatible vacuum gauges
• Water chiller

Make and Model

Linseis TGA, PT1000

Specifications

• Design- Top-loading
• Temperature range- RT up to 1100°C
• Heating and Cooling rates- 0.001 bis 250°C/min
• Sample mass- max. 5 g
• Resolution- 0.1 µg
• Gas atmosphere- Inert, ocid., red., vaccum
• Vacuum- up to 10E-3mbar
• Gas Dosing- built-in MFC block with 3 gases (one Purge gas and two reactive gases)
• Cool down speed- < 12min (1100°C – 100°C)
• Sample Carriers- TGA
• Sample robot- 42 positions
• Crucible- Pt, Al2O3, Au, Al, Ag etc. others on request
• EGA Couplings- Optional FTIR and/or MS or GC-MS